XY-stage for alignment of optical elements in MOEMS.
| Autor: | Peter, Yves-Alain, Herzig, Hans Peter, Bottinelli, Stefano |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p202-209, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Peter, Yves-Alain, Herzig, Hans Peter, Bottinelli, Stefano |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p202-209, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|