Efficient process development for bulk silicon etching using cellular automata simulation techniques.
| Autor: | Marchetti, James, He, Yie, Than, Olaf, Akkaraju, Sandeep |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p287-295, 9p |
| Databáze: | Complementary Index |
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