CD guarantee for the next-generation photomasks with CD-SEM.
| Autor: | Iwamatsu, Takayuki, Hiruta, Koji, Morimoto, Hiroaki, Ataka, Masashi, Nitta, Jun |
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| Zdroj: | Proceedings of SPIE; Nov1998 Part 2, Issue 1, p505-512, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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