Analysis of debris generated during UV laser micromachining of silicon.
| Autor: | O'Connor, Gerard M., Howard, Helen, Conneely, Alan J., Glynn, Thomas J. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p241-249, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|