Controlling template response during imprint lithography.
| Autor: | Schuetter, Scott D., Dicks, Gerald A., Nellis, Greg F., Engelstad, Roxann L., Lovell, Edward G., Schulteis, Brad F. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p1023-1033, 11p |
| Databáze: | Complementary Index |
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