Status of Philips' extreme UV source.
| Autor: | Pankert, Joseph, Bergmann, Klaus, Klein, Juergen, Neff, Willi, Rosier, Oliver, Seiwert, Stefan, Smith, Christopher, Probst, Sven, Vaudrevange, Dominik, Siemons, Guido, Apetz, Rolf, Jonkers, Jeroen, Loeken, Michael, Derra, Guenther, Kruecken, Thomas, Zink, Peter |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p152-159, 8p |
| Databáze: | Complementary Index |
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