Total test repeatability: a new figure of merit for CD metrology tools.
| Autor: | Cramer, Hugo, Kiers, Ton, Vanoppen, Peter, Meessen, Jeroen, Blok, Frans, Dusa, Mircea V. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p1254-1264, 11p |
| Databáze: | Complementary Index |
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