Total measurement uncertainty and total process precision evaluation of a structural metrology approach to monitoring post-CMP processes.
| Autor: | Lu, Wei, Archie, Charles N., Stone, Stacey, Kang, Hyoung H., Chitturi, Prasanna R. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p503-514, 12p |
| Databáze: | Complementary Index |
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