Spectroscopic ellipsometry-based scatterometry for depth and linewidth measurements of polysilicon-filled deep trenches.
| Autor: | Hingst, Thomas, Moert, Manfred, Reinig, Peter, Backen, Elke, Dost, Rene, Weidner, Peter, Hopkins, John, Dziura, Ted G., Elazami, Assim, Freed, Regina |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p587-596, 10p |
| Databáze: | Complementary Index |
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