Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control.
| Autor: | Sendelbach, Matthew, Natzle, Wesley, Archie, Charles N., Banke, Bill, Prager, Dan, Engelhard, Dan, Ferns, Jason, Yamashita, Asao, Funk, Merritt, Higuchi, Fumihiko, Tomoyasu, Masayuki |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p686-702, 17p |
| Databáze: | Complementary Index |
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