Impact of BARC on SEM shrinkage of ArF resist.
| Autor: | Lee, Shi Yong, Kim, Myungsun, Yoon, Sangwoong, Kim, Kyung-Mee, Kim, Jae Hyun, Kim, Hyun-Woo, Woo, Sang-Gyun, Kim, Young Ho, Chon, Sang-Mun, Kishioka, Takahiro, Sone, Yasuhisa, Nakajima, Yasuyuki |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p575-582, 8p |
| Databáze: | Complementary Index |
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