Silicon backbone polymers as EUV resists.
| Autor: | Bravo-Vasquez, Juan Pablo, Kwark, Young-Je, Ober, Christopher K., Cao, Heidi B., Deng, Hai, Meagley, Robert P. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p739-745, 7p |
| Databáze: | Complementary Index |
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