E-beam proximity effect parameters for sub-100-nm features.
| Autor: | Mountfield, Keith R., Eckert, Andrew R., Yang, XiaoMin, Johns, Earl C. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p959-966, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Mountfield, Keith R., Eckert, Andrew R., Yang, XiaoMin, Johns, Earl C. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p959-966, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|