Correction of 157-nm lens based on phase ring aberration extraction method.
| Autor: | Meute, Jeff, Rich, Georgia K., Conley, Will, Smith, Bruce W., Zavyalova, Lena V., Cashmore, Julian S., Ashworth, Dominic, Webb, James E., Rich, Lisa |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p195-203, 9p |
| Databáze: | Complementary Index |
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