Simulation of the coupled thermal optical effects for liquid immersion micro-/nano-lithography.
| Autor: | Baek, So-Yeon, Wei, Alexander C., Cole, Daniel C., Nellis, Greg, Yeung, Michael S., Abdo, Amr Y., Engelstad, Roxann L. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p415-427, 13p |
| Databáze: | Complementary Index |
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