Model-based OPC/DRC considering local flare effects.
| Autor: | Futatsuya, Hiroki, Yao, Teruyoshi, Osawa, Morimi, Ogino, Kozo, Hoshino, Hiromi, Arimoto, Hiroshi, Machida, Yasuhide, Asai, Satoru |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p451-458, 8p |
| Databáze: | Complementary Index |
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