Improvement of unified mask data formats for EB writers.
| Autor: | Suzuki, Toshio, Hirumi, Junji, Yoshioka, Nobuyuki, Hojyo, Yutaka, Kawase, Yuichi, Hara, Shigehiro, Kuriyama, Koki, Hoga, Morihisa, Watanabe, Satoshi W., Kawase, Hidemichi, Kamimoto, Tomoko, Kato, Kokoro |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p414-421, 8p |
| Databáze: | Complementary Index |
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