High-resolution EUV Microstepper tool for resist testing and technology evaluation.
| Autor: | Brunton, Adam, Cashmore, Julian S., Elbourn, Peter, Elliner, Graeme, Gower, Malcolm C., Grunewald, Philipp, Harman, M., Hough, S., McEntee, N., Mundair, S., Rees, D., Richards, P., Truffert, V., Wallhead, Ian, Whitfield, Michael D. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p681-692, 12p |
| Databáze: | Complementary Index |
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