Effect of electrostatic chucking on EUVL mask flatness.
| Autor: | Mikkelson, Andrew R., Engelstad, Roxann L., Lovell, Edward G., Aschke, Lutz, Rueggeberg, Frauke, Sobel, Frank |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p120-128, 9p |
| Databáze: | Complementary Index |
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