Proposal for a distributed parallel system for high-throughput maskless e-beam lithography.
| Autor: | Groves, Timothy R., Pickard, Daniel S. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p173-177, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Groves, Timothy R., Pickard, Daniel S. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p173-177, 5p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|