Phase standard based on profilometer metrology standard.
| Autor: | Hughes, Gregory P., Goodman, Cindy, Antesberger, Gunter, Burges, Stefan, Morrison, Troy B., Buxbaum, Alex H. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p1117-1123, 7p |
| Databáze: | Complementary Index |
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