Enhancement of unified mask data formats for EB writers.
| Autor: | Suzuki, Toshio, Hirumi, Junji, Yoshioka, Nobuyuki, Hojyo, Yutaka, Kawase, Yuichi, Sakamoto, Shinji, Kuriyama, Koki, Narukawa, Syogo, Houga, Morihisa |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p1186-1194, 9p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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