Updates on the coefficient of thermal expansion property and surface finish capability of CLEARCERAM-Z series for EUVL photomask substrate application.
| Autor: | Nakajima, Kousuke, Nakajima, Toshihide |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p1385-1396, 12p |
| Databáze: | Complementary Index |
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