Wavelength-dependent spot defects on advanced embedded attenuated phase-shift masks.
| Autor: | Magg, Christopher K., Benz, Jason M., Kindt, Louis, Smith, Adam C., Burnham, Jay, Riendeau, Jeffrey, Johnson, Christy, Kontra, Rick |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p72-80, 9p |
| Databáze: | Complementary Index |
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