Modeling and experimental investigation of bubble entrainment for flow over topography during immersion lithography.
| Autor: | Burnett, Holly B., Wei, Alexander C., El-Morsi, Mohamed S., Shedd, Timothy A., Nellis, Gregory F., Spike, Benjamin T., Van Peski, Chris, Grenville, Andrew, Engelstad, Roxann L. |
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| Zdroj: | Proceedings of SPIE; Nov2004, Issue 1, p829-840, 12p |
| Databáze: | Complementary Index |
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