MEMS/MOEMS foundry services at INO.
Autor: | García-Blanco, Sonia, Ilias, Samir, Williamson, Fraser, Généreux, Francis, Le Noc, Loïc, Poirier, Michel, Proulx, Christian, Tremblay, Bruno, Provençal, Francis, Desroches, Yan, Caron, Jean-Sol, Larouche, Carl, Beaupré, Patrick, Fortin, Benoit, Topart, Patrice, Picard, Francis, Alain, Christine, Pope, Timothy, Jerominek, Hubert |
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Zdroj: | Proceedings of SPIE; Nov1989, Issue 1, p77500R-77500R-10, 10p |
Databáze: | Complementary Index |
Externí odkaz: |