Prospects for high-power high-repetition-rate industrial excimer lasers.
Autor: | Borisov, Vladimir M., Khristoforov, Oleg B., Kirykhin, Yurii B., Vinokhodov, Aleksandr Y., Demin, Andrei I., Vodchits, V. A., Eltzov, A. |
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Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p348-352, 5p |
Databáze: | Complementary Index |
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