Prospects for high-power high-repetition-rate industrial excimer lasers.

Autor: Borisov, Vladimir M., Khristoforov, Oleg B., Kirykhin, Yurii B., Vinokhodov, Aleksandr Y., Demin, Andrei I., Vodchits, V. A., Eltzov, A.
Zdroj: Proceedings of SPIE; Nov2001, Issue 1, p348-352, 5p
Databáze: Complementary Index