Balancing of alternating phase-shifting masks for practical application: modeling and experimental verification.
| Autor: | Griesinger, Uwe A., Mader, Leonhard, Semmler, Armin, Dettmann, Wolfgang, Noelscher, Christoph, Pforr, Rainer |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p372-383, 12p |
| Databáze: | Complementary Index |
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