Fabrication process and transmission characteristics of SCALPEL mask blanks with thin SiNx membranes.
| Autor: | Han, Sang-In, Mangat, Pawitter J. S., Dauksher, William J., Chor, Michael, Liddle, James A., Novembre, Anthony E. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p717-723, 7p |
| Databáze: | Complementary Index |
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