Predicting thermomechanical distortions of optical reticles for 157-nm technology.
| Autor: | Abdo, Amr Y., Engelstad, Roxann L., Beckman, William A., Mitchell, John W., Lovell, Edward G. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p724-732, 9p |
| Databáze: | Complementary Index |
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