Ion-beam sputter-deposited SiN/TiN attenuating phase-shift photoblanks.
Autor: | Dieu, Laurent, Carcia, Peter F., Mitsui, Hideaki, Ueno, Kunihiko |
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Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p810-817, 8p |
Databáze: | Complementary Index |
Externí odkaz: |