Ion-beam sputter-deposited SiN/TiN attenuating phase-shift photoblanks.
| Autor: | Dieu, Laurent, Carcia, Peter F., Mitsui, Hideaki, Ueno, Kunihiko |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p810-817, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|
| Autor: | Dieu, Laurent, Carcia, Peter F., Mitsui, Hideaki, Ueno, Kunihiko |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p810-817, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|