Process development of fast and sensitive polySiGe microbolometer arrays.
| Autor: | De Moor, Piet, Kavadias, Spyros, Leonov, Vladimir N., Van Hoof, Chris A. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p94-99, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|