Hybrid integration of light-emitters and detectors with SOI-based micro-opto-electro-mechanical systems (MOEMS).
Autor: | Kubby, Joel A., Calamita, Jim, Chang, Jen-Tsorng, Chen, Jingkuang, Gulvin, Peter, Lin, C.-C., Lofthus, Robert, Nowak, Bill, Su, Yi, Tran, Alex, Burns, David, Bryzek, Janusz, Gilbert, John, Hsu, Charles, Korsmeyer, Tom, Morris III, Arthur S., Plowman, Thomas E., Rabinovich, Vladimir L., Daiber, Troy D., Scharf, Bruce R. |
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Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p32-45, 14p |
Databáze: | Complementary Index |
Externí odkaz: |