Multiple-anion nonvolatile acetal (MANA) resists.

Autor: Guevremont, Jeffrey M., Brainard, Robert L., Reeves, Scott D., Zhou, Xin, Nguyen, Thinh B., Mackevich, Joseph F., Anderson, Erik H., Taylor, Gary N.
Zdroj: Proceedings of SPIE; Nov2001, Issue 1, p255-267, 13p
Databáze: Complementary Index