Multiple-anion nonvolatile acetal (MANA) resists.
Autor: | Guevremont, Jeffrey M., Brainard, Robert L., Reeves, Scott D., Zhou, Xin, Nguyen, Thinh B., Mackevich, Joseph F., Anderson, Erik H., Taylor, Gary N. |
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Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p255-267, 13p |
Databáze: | Complementary Index |
Externí odkaz: |