High-accuracy aerial image measurement for electron-beam projection lithography.
| Autor: | Yahiro, Takehisa, Hirayanagi, Noriyuki, Morita, Kenji, Irita, Takeshi, Yamamoto, Hajime, Suzuki, Shohei, Shimizu, Hiroyasu, Kawata, Shintaro, Okino, Teruaki, Suzuki, Kazuaki |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p483-490, 8p |
| Databáze: | Complementary Index |
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