Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer.
| Autor: | Naulleau, Patrick P., Goldberg, Kenneth A., Anderson, Erik H., Batson, Phillip J., Denham, Paul, Jackson, Keith H., Rekawa, Senajith, Bokor, Jeffrey |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p639-645, 7p |
| Databáze: | Complementary Index |
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