Scanning probe position encoder (SPPE): a new approach for high-precision and high-speed position measurement system.
| Autor: | Ohara, Tetsuo |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p552-561, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Ohara, Tetsuo |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p552-561, 10p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|