Silicon-containing resists for 157-nm applications.
| Autor: | Sooriyakumaran, Ratnam, Fenzel-Alexander, Debra, Fender, Nicolette, Wallraff, Gregory M., Allen, Robert D. |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p319-326, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|