Development of DUV resists for zero angle and angled implant applications.
| Autor: | Fallon, Patricia, Cronin, Michael F., Lachowski, Joseph, Valerio, Pasquale R., Bachetti, Larry, Georger Jr., Jacque H., Mori, Mike, Tomes, David N., Wynja, Kim |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p601-609, 9p |
| Databáze: | Complementary Index |
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