Lithographic behavior of carboxylate-based dissolution inhibitors and the effect of blending.
| Autor: | Houlihan, Francis M., Yan, Zhenglin, Reichmanis, Elsa, Dabbagh, Gary, Bolan, Kevin J., Nalamasu, Omkaram, Rushkin, Ilya L., Dimov, Ognian N. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p703-711, 9p |
| Databáze: | Complementary Index |
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