Sumitomo resist on various BARC substrates using SVGL micrascan 193.
| Autor: | Rajaratnam, Martha M., Baxter, Greg H., Riggs, Mark, Tasaico, Pedro, Zimmerman, John D., Beach, James V., Holland, P., Morris, Chris, Spurlock, Kyle |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p761-775, 15p |
| Databáze: | Complementary Index |
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