High-etch-rate type 248-nm bottom antireflective coatings.
| Autor: | Enomoto, Tomoyuki, Arase, Shinya, Mizusawa, Kenichi, Fukuro, Hiroyoshi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p821-828, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Enomoto, Tomoyuki, Arase, Shinya, Mizusawa, Kenichi, Fukuro, Hiroyoshi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p821-828, 8p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|