Improved crosslinkable polymeric binders for 193-nm bottom antireflective coatings (BARCs).
| Autor: | Meador, James D., Shao, Xie, Bhave, Mandar, Cox, Chris, Thompson, John, Thomas, Debra L., Gibbons, Stephen, Farnsworth, Ashley, Rich, Michael D. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p846-854, 9p |
| Databáze: | Complementary Index |
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