Design and fabrication of customized illumination patterns for low-k1 lithography: a diffractive approach.
| Autor: | Himel, Marc D., Hutchins, Robert E., Colvin, Jamey C., Poutous, Menelaos K., Kathman, Alan D., Fedor, Adam S. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p1436-1442, 7p |
| Databáze: | Complementary Index |
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