Application of 3D EMF simulation for development and optimization of alternating phase-shifting masks.
| Autor: | Semmler, Armin, Mader, Leonhard, Elsner, Annika, Koehle, Roderick, Griesinger, Uwe A., Noelscher, Christoph |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p356-367, 12p |
| Databáze: | Complementary Index |
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