Establishment of production processes and assurance method for alternating phase shift masks.
| Autor: | Murai, Shiaki M., Koizumi, Yasuhiro, Kamibayashi, Tatsuhiko, Saitou, Hidetaka, Hoga, Morihisa, Morikawa, Yasutaka, Miyashita, Hiroyuki |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p60-72, 13p |
| Databáze: | Complementary Index |
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