Experimental investigation, modeling, and simulations for MEMS-based gas sensor used for monitoring process chambers in semiconductor manufacturing.
| Autor: | Jafri, Ijaz H., DiMeo Jr., Frank, Neuner, Jeffrey W., DiMascio, Sue, Marchetti, James |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p35-44, 10p |
| Databáze: | Complementary Index |
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