Packaging of optical MEMS devices.
| Autor: | Low, Yee L., Scotti, Ronald E., Ramsey, David A., Bolle, Cristian A., O'Neill, Steven P., Nguyen, Khanh C. |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p409-414, 6p |
| Databáze: | Complementary Index |
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