Optimization of fabrication process for dual-trench-type alternating PSM.
| Autor: | Komizo, Tooru, Kagami, Ichiro, Kakuta, Daichi, Kawahira, Hiroichi |
|---|---|
| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p125-131, 7p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|