Acid-breakable-resin-based chemical amplification positive resist for 0.1-m-rule reticle fabrication: design and lithographic performance.
| Autor: | Migitaka, Sonoko, Arai, Tadashi, Sakamizu, Toshio, Kasuya, Kei, Hashimoto, Michiaki, Shiraishi, Hiroshi |
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| Zdroj: | Proceedings of SPIE; Nov2001, Issue 1, p341-350, 10p |
| Databáze: | Complementary Index |
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